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WORKSHOP ON MICRO POWER GENERATORS (Download Poster and Oral Presentations)

The Micro and Nano Systems (MNS) research group is part of the TIMA laboratory in Grenoble, France. Research activities of the MNS group are focused on integrated microsystems, MEMS and nanosystems. Several research projects are engaged on the development of innovative integrated microsystems including MEMS and electronics.

OBJECTIVES

Research fields of the MNS group adress integrated microsystems made with IC compatible MEMS technologies. Research activities address both fields of MEMS design and mixed signal Integrated Circuits design. The Micro and nanosystems group collaborates extensively with both industry, research laboratories and universities, and emphasizes on the ability to work on medium term industrial projects.

TOPICS

In recent years, a very large amount of scientific work has been achieved around microelectromechanical systems (MEMS). Some industrial success stories (accelerometers, gyroscopes and MOEMS) have shown their maturity. MEMS are now starting to take place around us in our everyday life as microelectronics did 20 years ago. However, a lot of effort is still needed for the integration of ICs and MEMS. Quite every kind of sensor or actuator has been successfully developed with MEMS technologies whereas a very little work has been done on integration of MEMS devices with complex integrated circuits. An important part of the MNS group research activity is centred on integrated MEMS with the vision of "SoC including MEMS" as target. We believe that the future of MEMS is beside millions of transistors in large mixed signal Systems On Chip. These integrated MEMS devices will act not only as sensors but also as actuators or electric devices like switches, filters and so on. Recently, the MNS group started a new field of investigation concerning the nanosystems and in particular the CAD tools for the design of new nanosensors based mainly on Carbon Nanotubes (CNT).

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